Ndepụta njikwa zuru oke: ụkpụrụ mgbawa Dutch ọhụrụ na-emetụta ụdị DUV?

Akụkọ Tibco, June 30, gọọmentị Dutch nyere iwu kachasị ọhụrụ na njikwa mbupụ nke akụrụngwa semiconductor, ụfọdụ mgbasa ozi kọwara nke a dị ka njikwa fotolithography megide China ọzọ gbagoro na DUV niile.N'ezie, ụkpụrụ njikwa mbupụ ọhụrụ ndị a lekwasịrị anya na teknụzụ nrụpụta mgbawa 45nm dị elu na nke dị n'okpuru, gụnyere akụrụngwa ALD atomiki nke ọgbara ọhụrụ, akụrụngwa uto epitaxial, akụrụngwa ntinye plasma na sistemụ immersion lithography, yana teknụzụ, sọftụwia ejiri. iji na ịzụlite ngwa dị elu dị otú ahụ.

Na nkwupụta na Tibco, ASML kwusiri ike na iwu nchịkwa mbupụ mbupụ ọhụrụ nke gọọmentị Dutch na-ekpuchi ụfọdụ ụdị DUV kachasị ọhụrụ, gụnyere TWINSCAN NXT: 2000i na usoro immersion lithography na-esote.Amachibidoro lithography EUV na mbụ, gọọmentị Dutch anaghị achịkwa mbupu nke sistemu ndị ọzọ.Dị ka ASML ozi website ozi, DUV immersion lithography usoro, gụnyere: TWINSCAN NXT:2050i, NXT:2050i, NXT:1980Di atọ lithography igwe, ndị a nwere ike mepụta 38nm ~ 45nm usoro wafer nhazi.

 

Tụkwasị na nke ahụ, igwe DUV lithography akọrọ nke nwere ike ịmegharị wafer n'elu 45nm, dị ka usoro 65nm ~ 220nm, dị ka TWINSCAN XT: 400L, XT: 1460K, NXT: 870, wdg, adịghị etinye na listi mmachi Dutch.

Ndepụta njikwa Dutch, dị ka Tibco tụgharịrị, bụ nke a:

Regulation MinBuza.2023.15246-27 nyere site Minister of Foreign Trade na Development Cooperation nke Netherlands na-enye maka ikikere chọrọ maka mbupụ nke elu mmepụta akụrụngwa maka semiconductor na-adịghị na mbụ kwuru na Annex m nke Regulation No. 2021/821 (metụtara elu semiconductor). akụrụngwa nrụpụta)

Nkeji edemede 2: Iwu a na-amachibido mbupụ nke ihe nrụpụta semiconductor dị elu sitere na Netherlands na-enweghị ikike nke Minista.

Nkeji edemede 3:

1. Ngwa maka ikike a kpọtụrụ aha na Nkeji edemede 2 ga-abụ onye na-ebupụ ma nyefee onye ọka iwu.

2. N'ọnọdụ ọ bụla, ngwa a ga-enwe:

a) aha na adreesị nke onye mbupụ;

b） Aha na adreesị nke onye nnata na onye njedebe nke ihe nrụpụta semiconductor dị elu;

c） Aha na adreesị nke onye nnata na onye njedebe nke ngwa nrụpụta semiconductor dị elu.

3, n'ọnọdụ ọ bụla, onye ọka iwu nwere ikike ịrịọ onye na-ebupụ ya ka ọ nye nkwekọrịta na mbupụ, na nkwupụta na njedebe njedebe.

Nkeji edemede 4:

Ikikere akọwara na Nkeji edemede 2, nwere ike dabere na ọnọdụ na ndokwa.

Inye ikike nke akọwara na Nkeji edemede 2 nwere ike ịdị na ntozu.

Edemede V:

Enwere ike ịkagbu ikikere ndị a kpọtụrụ aha na edemede II n'okwu ndị a:

a) Enyere ikike ahụ dabere na ozi ezighi ezi ma ọ bụ ezughị oke;

b) Usoro, ọnọdụ na mmachi nke ikike agbasoghị;

c) Maka ebumnuche nke mba ofesi na amụma nchekwa.